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Proceedings Paper

Deflection of silicon dioxide microbridge under distributed load
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Paper Abstract

This paper reports our recent fabrication effort in producing suspended-silicon-nanowire based static sensors, which is an extension to our previous theoretical and numerical studies. The static sensor consists of four suspended silicon dioxide microwires and one silicon dioxide microplate. Each side of the microplate includes two silicon dioxide microwires, instead of one, to avoid the possible torsion of the microplate and make the microplate remain parallel to the substrate before detection. Most of the bridges are curved, instead of being straight, as simulated with the FEA software previously. Silicon dioxide microbridges were fabricated, and gold/Ni was deposited on the bridge surface. The resulting deflection was observed with Roughness Step Tester (RST).

Paper Details

Date Published: 3 May 2007
PDF: 8 pages
Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655608 (3 May 2007); doi: 10.1117/12.721275
Show Author Affiliations
Hao Li, Louisiana Tech Univ. (United States)
Anirban Chakraborty, Louisiana Tech Univ. (United States)
Xinchuan Liu, Louisiana Tech Univ. (United States)
Hui Wang, Louisiana Tech Univ. (United States)
Cheng Luo, Louisiana Tech Univ. (United States)


Published in SPIE Proceedings Vol. 6556:
Micro (MEMS) and Nanotechnologies for Defense and Security
Thomas George; Zhongyang Cheng, Editor(s)

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