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Proceedings Paper

Influence of gas microsensor mounting technique on its temperature time constant
Author(s): Wojciech Maziarz; Tadeusz Pisarkiewicz
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Paper Abstract

Metal oxide semiconductor gas sensors with modulated working temperature should reveal small thermal time constant in comparison to the time constants of chemical reactions between gas atmosphere and sensitive layer. In such case analyzed sensor response is dominated with specific phenomena originated from these reactions. A way the sensors are mounted has big influence on the sensor thermal time constants. In experiments authors used gas sensors with ceramic and micromachined silicon substrates glued to the case or suspended on thin wires. Although mechanical stability and durability of glued sensors are better, the lower power consumption and lower time constants are possible with sensors mounted using thin wires.

Paper Details

Date Published: 20 October 2006
PDF: 4 pages
Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480Q (20 October 2006); doi: 10.1117/12.721110
Show Author Affiliations
Wojciech Maziarz, AGH Univ. of Science and Technology (Poland)
Tadeusz Pisarkiewicz, AGH Univ. of Science and Technology (Poland)


Published in SPIE Proceedings Vol. 6348:
Optoelectronic and Electronic Sensors VI

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