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Proceedings Paper

Preparation and properties of nanoporous alumina-based humidity sensors
Author(s): Adam Madany; Piotr Jasiński; Grzegorz Jasiński; Bogdan Chachulski; Antoni Nowakowski
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Paper Abstract

In this paper preparation method of nano-porous alumina based humidity sensors is presented. Investigation of relation between technological process parameters, sensor's porous layer structure and electric parameters is main aim of this study. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.

Paper Details

Date Published: 20 October 2006
PDF: 8 pages
Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480C (20 October 2006); doi: 10.1117/12.721044
Show Author Affiliations
Adam Madany, Gdansk Univ. of Technology (Poland)
Piotr Jasiński, Gdansk Univ. of Technology (Poland)
Grzegorz Jasiński, Gdansk Univ. of Technology (Poland)
Bogdan Chachulski, Gdansk Univ. of Technology (Poland)
Antoni Nowakowski, Gdansk Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 6348:
Optoelectronic and Electronic Sensors VI

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