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Proceedings Paper

Low cost MEMS hydrophones
Author(s): Keith J. Rebello; David A. Kitchin; Robert F. Henrick; Francisco Tejada
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Paper Abstract

A new approach for microelectromechanical systems (MEMS) hydrophones is discussed, which yields miniature, low power, and high performance hydrophones. The prototype devices use a laser interferometer with integrated low power electronics built on conventional silicon on sapphire (SOS) complimentary metal oxide semiconductor (CMOS) technology to optically detect pressure waves. Results show sensitivities of -143 dBV re 1 μPa, comparable to or better than piezoelectric, capacitive condenser, or other optical approaches. The implication is to make very low cost hydrophones while drastically reducing the power and computational requirements. This is viewed as a disruptive technology for areas such as coastal defense and port security where cost, size and power consumption is key.

Paper Details

Date Published: 4 May 2007
PDF: 8 pages
Proc. SPIE 6540, Optics and Photonics in Global Homeland Security III, 65400W (4 May 2007); doi: 10.1117/12.720149
Show Author Affiliations
Keith J. Rebello, The Johns Hopkins Univ. Applied Physics Lab. (United States)
David A. Kitchin, The Johns Hopkins Univ. Applied Physics Lab. (United States)
Robert F. Henrick, The Johns Hopkins Univ. Applied Physics Lab. (United States)
Francisco Tejada, Sensing Machines (United States)


Published in SPIE Proceedings Vol. 6540:
Optics and Photonics in Global Homeland Security III
Theodore T. Saito; Daniel Lehrfeld; Michael J. DeWeert, Editor(s)

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