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Proceedings Paper

Off-the-shelf PTFE as a fine polishing pad
Author(s): B. Mullany; E. Corcoran
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Paper Abstract

In the 70's Leistner [1] demonstrated that PTFE (Teflon) coated substrates, when used instead of pitch coated substrates, have the ability to produce polished surfaces with low surface roughness (<2A°) and high flatness (<&lgr;/100). Their PTFE tool was made by painting and curing several layers of PTFE on a glass ceramic substrate, a time and labor intensive process. Over the years there has been an increase in the number of formats in which PTFE can be purchased. One such format is that of thin PTFE sheets with an adhesive backing. The potential of this user friendly PTFE format to replace pitch was investigated. A thin sheet of PTFE was adhered to metal substrate and used to polish a glass workpiece. Different polishing set-ups were investigated and the resulting surface finish measured. Best surface roughness values obtained on optical glass polished with an alumina based slurry was Rrms = 0.49nm (Zygo interferometer 50x). Under the same conditions a pitch tool produced a surface roughness value of Rrms >1.1 nm (Zygo interferometer 50x). The material removal rate with pitch tooling was approximately five times greater than that achieved using the PTFE sheet. While the results are not as good as that produced by Leistner, the work does illustrate the potential of an off the shelf PTFE sheet as a polishing pad. Should the entire process be further optimized lower surface roughness values should be obtainable.

Paper Details

Date Published: 14 May 2007
PDF: 3 pages
Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161F (14 May 2007); doi: 10.1117/12.719769
Show Author Affiliations
B. Mullany, Univ. of North Carolina at Charlotte (United States)
E. Corcoran, Univ. of North Carolina at Charlotte (United States)

Published in SPIE Proceedings Vol. 10316:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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