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Proceedings Paper

Optically addressed spring-patterned membrane mirror MEMS with megahertz response
Author(s): Bahareh Haji-saeed; Gregory Griffith; Sandip K. Sengupta; William D. Goodhue; Jed Khoury; Charles L. Woods; John Kierstead
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Paper Abstract

In this paper, the fabrication, modeling and characterization of an all optically addressed spring patterned silicon-nitride deformable mirror Micro-Electro-Mechanical-System (MEMS) device is reported. This device is biased through combinations of high frequency AC and DC voltages. The experimentally verified theoretical modeling for this device shows mirror deflection saturation as a function of light intensity appropriate for dynamic range compression deconvolution. It was experimentally verified that the spring MEMS deformable mirror device has response up to 10 MHz, which opens the possibility of correcting supersonic turbulence as well as atmospheric turbulence.

Paper Details

Date Published: 10 May 2007
PDF: 7 pages
Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 65560C (10 May 2007); doi: 10.1117/12.719630
Show Author Affiliations
Bahareh Haji-saeed, Univ. of Massachusetts, Lowell (United States)
Solid State Scientific Corp. (United States)
Gregory Griffith, Univ. of Massachusetts, Lowell (United States)
Sandip K. Sengupta, Univ. of Massachusetts, Lowell (United States)
William D. Goodhue, Univ. of Massachusetts, Lowell (United States)
Jed Khoury, Air Force Research Lab. (United States)
Charles L. Woods, Air Force Research Lab. (United States)
John Kierstead, Solid State Scientific Corp. (United States)


Published in SPIE Proceedings Vol. 6556:
Micro (MEMS) and Nanotechnologies for Defense and Security
Thomas George; Zhongyang Cheng, Editor(s)

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