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Proceedings Paper

Compensation of vibration errors in high-performance interferometry
Author(s): Leslie L. Deck
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Paper Abstract

Here I describe results of a method for reducing the influence of vibrations in PSI using the spatial information in the interference intensity images to achieve as much as 100X reduction in induced surface distortion for small-amplitude vibrations. The interference patterns are first normalized for the distribution in illumination across the field of view by measuring the empty-cavity intensity distribution of light reflected from the reference surface prior to measuring the object. The technique then determines the phase increments between acquired frames by comparing the measured interference intensity patterns, and then uses these increments to recalculate a vibration-corrected profile. This approach does not require spatial carrier fringes and maintains full lateral sampling resolution. The method can be applied to any PSI acquisition, and is compatible with most surface shapes encountered in optical testing, including flats, spheres and mild aspheres. Unlike carrier-fringe techniques, as few as one or two interference fringes are sufficient for calculating the phase increments.

Paper Details

Date Published: 14 May 2007
PDF: 2 pages
Proc. SPIE TD04, Optifab 2007: Technical Digest, TD040U (14 May 2007); doi: 10.1117/12.719429
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. TD04:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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