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Proceedings Paper

High precision interferometer for measuring mid-spatial frequency departure in free form optics
Author(s): Leslie L. Deck
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Paper Abstract

Spherical-reference objectives, retrace error correction and environmental (vibration) compensation are incorporated into a scanning white light microscope to enable high-precision measurements of precision optics over a mid-spatial frequency range from 1 and 500 mm-1. The complete metrology platform with automated calibration and positioning demonstrates a measurement repeatability of less than 65pm, while achieving a global uncertainty of less than 100pm for surfaces up to 450mm in size and aspheric departures up to 2 &mgr;m/mm. Keywords: Interferometry, optics, aspheres, metrology.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE TD04, Optifab 2007: Technical Digest, TD040M (14 May 2007); doi: 10.1117/12.719404
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. TD04:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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