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Proceedings Paper

InAs/GaSb type-II short-period superlattices for advanced single and dual-color focal plane arrays
Author(s): Martin Walther; Robert Rehm; Joachim Fleissner; Johannes Schmitz; Johann Ziegler; Wolfgang Cabanski; Rainer Breiter
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Paper Abstract

The fabrication and optimization of InAs/GaSb type-II superlattice (SL) detectors for single-color and dual-color focal plane arrays in the mid-wavelength infrared spectral range between 3-5 &mgr;m is reported. Single color focal plane arrays with 288 x 384 detector elements and 24 &mgr;m pitch have been fabricated with high pixel yield. Camera systems with InAs/GaSb SL detectors reveal NETD values of 27.9 mK at a cut-off wavelength of &lgr;c = 4.9 &mgr;m for an integration time of only 1 msec with F#/2.4 optics. A dual-color MWIR/MWIR InAs/GaSb SL camera, developed for missile approach warning systems, features simultaneous and spatially coincident detection for both spectral channels on each pixel. The camera system with 288 x 384 detector elements in 40 &mgr;m pitch shows excellent NETD values and high pixel operability. The fabrication of dual-color focal plane arrays on 3" GaSb substrates is presented.

Paper Details

Date Published: 14 May 2007
PDF: 8 pages
Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 654206 (14 May 2007); doi: 10.1117/12.719227
Show Author Affiliations
Martin Walther, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Robert Rehm, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Joachim Fleissner, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Johannes Schmitz, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Johann Ziegler, AIM Infrarot-Module GmbH (Germany)
Wolfgang Cabanski, AIM Infrarot-Module GmbH (Germany)
Rainer Breiter, AIM Infrarot-Module GmbH (Germany)


Published in SPIE Proceedings Vol. 6542:
Infrared Technology and Applications XXXIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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