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Proceedings Paper

Application of single neuron adaptive control in one dimensional stage with high speed and high precision composite motions
Author(s): Hong Li; Meifa Huang; Yunfei Zhou
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Paper Abstract

In this paper, a particular mechanical servo system is presented based on the design requirement of scanning wafer stage of 0.1 μm lithography. In order to achieve high accuracy and high speed, linear motor and voice coil motor is employed to control long stroke motions and short stroke motions, respectively. Considering extraneous forces resident in the system, a composite movement model with disturbing compensation employing single neuron and multiple inputs is then given. The results of actual application demonstrate that the given system with better robustness can enhance the real-time tracing ability and can satisfy high accuracy at high speed along specified trajectories.

Paper Details

Date Published: 30 October 2006
PDF: 9 pages
Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 63584G (30 October 2006); doi: 10.1117/12.718186
Show Author Affiliations
Hong Li, Huazhong Univ. of Science and Technology (China)
Meifa Huang, Guilin Univ. of Electronic Technology (China)
Yunfei Zhou, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6358:
Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation
Jiancheng Fang; Zhongyu Wang, Editor(s)

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