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Proceedings Paper

A two-dimensional displacement sensor and its application in profile measurement
Author(s): Xudong Yang; Yurong Chen; Tiebang Xie
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Paper Abstract

The synthetic measurement of complex profile with high precision and large range is a difficulty among surface topography measuring techniques because the measuring range and the precision of traditional profilometers is limited. Moreover, the stylus of traditional profilometers cannot skim over the steep wall successfully. This paper presents a twodimension displacement sensor. Accompanied by the vertical scanning platform, the two-dimension displacement sensor can measure the complex profile with high precision and large range. The sensor is composed of two inductance displacement sensors. The vertical displacement sensor detects the vertical displacement and the horizontal displacement sensor detects the horizontal displacement. When the workpiece is measured, the vertical undulation of profile lead to the zero offset of the vertical displacement sensor. According to the zero offset, the piezoelectric actuator and the servo motor drive the vertical scanning platform to move vertically to ensure that the lever is always in balance position. When the stylus barges up against the steep wall, the horizontal resistance force results in the other zero offset of the horizontal displacement sensor. If the horizontal resistance force is too strong, the vertical scanning platform descends to make the stylus climb the steep wall successfully.

Paper Details

Date Published: 30 October 2006
PDF: 6 pages
Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635816 (30 October 2006); doi: 10.1117/12.717823
Show Author Affiliations
Xudong Yang, Huazhong Univ. of Science and Technology (China)
Guizhou Univ. (China)
Yurong Chen, Huazhong Univ. of Science and Technology (China)
Tiebang Xie, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6358:
Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation
Jiancheng Fang; Zhongyu Wang, Editor(s)

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