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Proceedings Paper

Changing temperature characters analysis along the axes of the thermal-excited silicon resonant beam
Author(s): Haihan Zhuang; Shangchun Fan; Zhiping Peng
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Paper Abstract

According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm, and the final sensing unit is a silicon beam resonator, this paper analyzed the distribution character of the changing temperature along the abscissa of the beam. With regard to the solution of the diffusion equation, it can be concluded that the changing temperature and the input power have the same frequency accurately, the range where the changing temperature exists is confined to a finite area, and a gap appears at the edge of the thermal resistor during the changing procedure. Hoping these conclusions is helpful of the more reasonable design.

Paper Details

Date Published: 28 October 2006
PDF: 6 pages
Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635807 (28 October 2006); doi: 10.1117/12.717501
Show Author Affiliations
Haihan Zhuang, Beijing Univ. of Aeronautics and Astronautics (China)
Shangchun Fan, Beijing Univ. of Aeronautics and Astronautics (China)
Zhiping Peng, Beijing Univ. of Aeronautics and Astronautics (China)


Published in SPIE Proceedings Vol. 6358:
Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation
Jiancheng Fang; Zhongyu Wang, Editor(s)

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