Share Email Print
cover

Proceedings Paper

Phase-only pupil filtering confocal measurement system with higher lateral resolution
Author(s): Lirong Qiu; Zhengde Feng; Dingguo Sha
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Phase-only pupil filtering confocal microscopy (PFCM), a new approach is proposed to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, which uses a three-zone phase-only pupil filter with lateral superresolution capability obtained through optimized design to change the confocal microscopy system's (CMS) distribution of three-dimensional point spread function, so that the CMS lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFCM are better than 0.2μm and 2nm, respectively, when λ= 632.8 nm, NA=0.85 and lateral spot size with a three-zone phase-only pupil filter GT=0.65.

Paper Details

Date Published: 6 November 2006
PDF: 6 pages
Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635740 (6 November 2006); doi: 10.1117/12.717275
Show Author Affiliations
Lirong Qiu, Beijing Institute of Technology (China)
Zhengde Feng, Harbin Institute of Technology (China)
Dingguo Sha, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6357:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Jiancheng Fang; Zhongyu Wang, Editor(s)

© SPIE. Terms of Use
Back to Top