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Proceedings Paper

Pitch calibration of one-dimensional grating standard by tapping mode nanometrological atomic force microscope
Author(s): Qiangxian Huang; Ichiko Misumi; Satoshi Gonda; Osamu Sato; Tomizo Kurosawa
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Paper Abstract

A tapping mode nanometrological Atomic Force Microscope system with an ultra-high resolution three-axis laser interferometer was introduced. In the nano-metrological AFM, laser interferometers are used to measure and control the relative movement between probe tip and sample, and the AFM can reach very high accuracy. By the tapping Mode AFM, the pith of a grating standard was calibrated. The sources of uncertainty were analyzed and the corresponding uncertainty components were given. According to the analysis and calculation, the most reliable value of the grating pitch with nominal value of 240 nm and its combined standard uncertainty are 240.024 ± 0.157 nm.

Paper Details

Date Published: 6 November 2006
PDF: 6 pages
Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635730 (6 November 2006); doi: 10.1117/12.717161
Show Author Affiliations
Qiangxian Huang, Hefei Univ. of Technology (China)
National Institute of Advanced Industrial Science and Technology (Japan)
Ichiko Misumi, National Institute of Advanced Industrial Science and Technology (Japan)
Satoshi Gonda, National Institute of Advanced Industrial Science and Technology (Japan)
Osamu Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Tomizo Kurosawa, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6357:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Jiancheng Fang; Zhongyu Wang, Editor(s)

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