Share Email Print
cover

Proceedings Paper

Sinusoidal phase modulating interferometer base on integration method
Author(s): Zhongbao Xu; Nan Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe a sinusoidal phase modulating interferometer in which a CCD image sensor measure phase values, the method uses four frames obtained by integration of the time-varying intensity in an interference pattern during the four quarters of the modulation period. The optimum amplitude and phase of the sinusoidal phase modulation were determined by considering the measurement error that is resulted in the additive noise; the effect caused by the deviation from the optimum phase modulation is analyzed. Theoretical analyses and experimental verifications have shown that the distance-measurement accuracy is 2.7 nm with these techniques.

Paper Details

Date Published: 24 October 2006
PDF: 8 pages
Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635725 (24 October 2006); doi: 10.1117/12.717115
Show Author Affiliations
Zhongbao Xu, Hubei Industry Univ. (China)
The Key Lab. of Modern Manufacturing Quantity Engineering of Hubei Province (China)
Nan Zhang, Hubei Industry Univ. (China)


Published in SPIE Proceedings Vol. 6357:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Jiancheng Fang; Zhongyu Wang, Editor(s)

© SPIE. Terms of Use
Back to Top