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Proceedings Paper

Changing face of surface metrology
Author(s): David J. Whitehouse
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Paper Abstract

In common with most disciplines surface metrology is having to evolve in order to meet the new requirements demanded by miniaturization and the increased use of semi conductor planar technology. Changes are taking place in theory as well as in the other constituents of an engineering design such as material properties and new manufacturing processes. In this paper a number of issues will be discussed. They will be by no means a comprehensive list but sufficient will be investigated to give an idea of the nature and scope on the problem. Amongst the topics covered will be nomenclature, some mechanical properties, force balance etc. There will be a look back at the way in which surface metrology evolved to see if lessons can be learned.

Paper Details

Date Published: 24 October 2006
PDF: 7 pages
Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63571J (24 October 2006); doi: 10.1117/12.716966
Show Author Affiliations
David J. Whitehouse, Univ. of Warwick (United Kingdom)
Univ. of Huddersfield (United Kingdom)
Taylor Hobson Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 6357:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Jiancheng Fang; Zhongyu Wang, Editor(s)

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