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Proceedings Paper

3D profilometry system based on absolute phase calibration
Author(s): Hao Yu; Shuangyun Shao; Zhifeng Zhang; Qibo Feng
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Paper Abstract

Improvement of absolute phase calibration in phase-measuring profilometry is presented. In order to calculate the absolute phase of calibration plane, linear interpolation of unwrapping phase of reference point is introduced. Accuracy of height calibration and measurement is improved. A novel 3D surface shape measurement system is designed. Experiments of given height plane are presented. The mean of measurement error of conventional algorithm is about 0.5 mm. That of the novel algorithm introduced in this paper is reduced to about 0.2 mm.

Paper Details

Date Published: 24 October 2006
PDF: 6 pages
Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63570M (24 October 2006); doi: 10.1117/12.716744
Show Author Affiliations
Hao Yu, Beijing Jiaotong Univ. (China)
Shuangyun Shao, Beijing Jiaotong Univ. (China)
Zhifeng Zhang, Beijing Jiaotong Univ. (China)
Qibo Feng, Beijing Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 6357:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Jiancheng Fang; Zhongyu Wang, Editor(s)

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