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Proceedings Paper

The theory of a micro hybrid piezoelectric actuation system
Author(s): Tian-Bing Xu; Ji Su
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Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 65280E; doi: 10.1117/12.716326
Show Author Affiliations
Tian-Bing Xu, National Institute of Aerospace (United States)
Ji Su, NASA Langley Research Ctr. (United States)


Published in SPIE Proceedings Vol. 6528:
Nanosensors, Microsensors, and Biosensors and Systems 2007
Vijay K. Varadan, Editor(s)

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