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Proceedings Paper

Error separating and correcting method of nanometer two-dimensional working table
Author(s): Hongtao Yang; Yetai Fei; Xiaohuai Chen; Qi Wang; Feixiang Jin
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Paper Abstract

The designing principle's analysis and the structure design using modern accuracy design concept of nanometer two dimension working table are introduced. The source of the uncertainty is overall analyzed. The error separating and correcting method is designed. The influence on the measurement result of the autocollimator and the interferometer produced by the angle error of the orthogonal prism is analyzed on principle. The preview experiments are done. The results indicate that the light path deflection using orthogonal prism has no influence on the error separating result, but without absolute zero position has obvious influence on the error separating result. The error correcting result shows that the precision demand of nanometer two-dimensional working table can be met.

Paper Details

Date Published: 13 October 2006
PDF: 8 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62802S (13 October 2006); doi: 10.1117/12.716299
Show Author Affiliations
Hongtao Yang, Hefei Univ. of Technology (China)
Anhui Univ. of Science and Technology (China)
Yetai Fei, Hefei Univ. of Technology (China)
Xiaohuai Chen, Hefei Univ. of Technology (China)
Qi Wang, Hefei Univ. of Technology (China)
Feixiang Jin, Hefei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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