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Proceedings Paper

Noncontact measurement of irregular reflective surfaces
Author(s): X. Liu; Y. Gao
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Paper Abstract

A pencil beam interference based slope measurement method is investigated. A new pencil beam generator design, which consists of a single parallel plane plate made of calcite crystal, is proposed. The generator is simple and compact in structure. It is convenient to use for adjustment and has high stability. Based on the generator, a new pencil beam interferometer for surface slope and normal vector distribution measurement is developed. A new method for surface normal vector abstraction from interference patterns and a new algorithm for surface reconstruction from the surface slope and normal vector distribution data are proposed and examined. Experimental testing results are presented to verify the proposed design and methods for irregular reflective surface measurement.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628023 (13 October 2006); doi: 10.1117/12.716205
Show Author Affiliations
X. Liu, Huazhong Univ. of Science and Technology (China)
Y. Gao, Hong Kong Univ. of Science and Technology (Hong Kong China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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