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Proceedings Paper

Surface detection based on single fringe pattern analysis
Author(s): Tingrui Liu; Ailing Gong; Yongrui Zhao; Guangqing Chen
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Paper Abstract

The optical surface metrology based on interference pattern analysis has been one of the study subjects that draw people's attention for a long time. The paper illustrated a study that improved FFT precision by revising exterpolation algorithm of single interference pattern, simulated different Spatial Carrier Phase Shift (SCPS) algorithms, on the basis of correlative literature, and analyzed error contrast. Finally, the paper established FFT, revised 5-point algorithm and N-point algorithm as real-time analysis approaches of single interference pattern.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628021 (13 October 2006); doi: 10.1117/12.716196
Show Author Affiliations
Tingrui Liu, ShanDong Univ. of Science and Technology (China)
Ailing Gong, ShanDong Univ. of Science and Technology (China)
Yongrui Zhao, ShanDong Univ. of Science and Technology (China)
Guangqing Chen, ShanDong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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