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Proceedings Paper

A method for the calibration of step gauges
Author(s): Hao Yan; Wuyi Wang
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Paper Abstract

To calibrate step gauges, a new linear measuring system was improved in our laboratory that combines the Leitz universal measuring machine of the 1960s with a laser interferometer. This paper introduces the measurement method and the calculation of the expanded uncertainty of the measurement. The expanded uncertainty of the system is (0.3 + L) μm at k=2, where L is given in meter.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800S (13 October 2006); doi: 10.1117/12.716185
Show Author Affiliations
Hao Yan, Shanxi Provincial Metrological Institute (China)
Wuyi Wang, Shanxi Provincial Metrological Institute (China)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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