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Proceedings Paper

A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement
Author(s): Yurong Chen; Xudong Yang; Tiebang Xie
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Paper Abstract

The measurement and characterization of three-dimensional surface topography is representative of a primary development direction of surface metrology. This paper presents a three-dimensional precision platform based on vertical scanning that has practical application in surface topography measurement. The three-dimensional precision platform is composed of a two-dimensional platform with metrology system and a vertical scanning platform. The vertical scanning platform is laid on the two-dimensional platform with metrology system. When the workpiece is measured, the closed loop control system controls the two-dimensional platform. Meanwhile, the Z direction servo motor and the piezoelectric actuator drive the vertical scanning platform to move vertically to realize the coarse and fine displacement. The diffraction grating displacement sensor detects the vertical relative displacement. So the precision positioning in X-Y direction is obtained and the vertical scanning in Z direction is realized during the surface topography measurement. The three-dimensional precision platform based on vertical scanning developed in this paper, as one of the key techniques, is the technique foundations for development of the improved contact or noncontact three-dimensional topography profilometers.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801X (13 October 2006); doi: 10.1117/12.716172
Show Author Affiliations
Yurong Chen, Huazhong Univ. of Science and Technology (China)
HuBei Automotive Industrial Institute (China)
Xudong Yang, Huazhong Univ. of Science and Technology (China)
Tiebang Xie, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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