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Proceedings Paper

Deep submicro flying height measuring technologies system
Author(s): Yuhe Li; Liang Wang; Qingxiang Li
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Paper Abstract

This paper describes a technique for the measurement of deep sub-micron flying height based on intensity interferometry, focuses on the introduction of operating principles, system configuration and image visual feedback techniques. Because the flying height is super low, micro pitch or roll of the slider will lead to measuring error. Thus a constant relative position between the optic spot and the slider should be assured. Imaging processing technique is used to obtain the coordinates of both the slider and the optic spot. A detection algorithm of the center of circle is detailed in this paper.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800O (13 October 2006); doi: 10.1117/12.716170
Show Author Affiliations
Yuhe Li, Tsinghua Univ. (China)
Liang Wang, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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