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Proceedings Paper

Topography measurements and applications
Author(s): Junfeng Song; Theodore Vorburger
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Paper Abstract

Based on auto- and cross-correlation functions (ACF and CCF), a new surface parameter called profile (or topography) difference, Ds, has been developed for quantifying differences between 2D profiles or between 3D topographies with a single number. When Ds = 0, the two compared 2D profiles or 3D topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at NIST. This system includes data acquisition stations using a stylus instrument and a confocal microscope, and a correlation program using the proposed parameters Ds and the cross-correlation function maximum CCFmax. Applications in forensic science and surface metrology are described; those include profile signature measurements for 40 NIST Standard Reference Material (SRM) 2460 standard bullets, and comparisons of profile measurements with four different techniques. An approach to optimizing the Gaussian filter long wavelength cutoff, λc, is proposed for topography measurements.

Paper Details

Date Published: 13 October 2006
PDF: 8 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801T (13 October 2006); doi: 10.1117/12.716162
Show Author Affiliations
Junfeng Song, National Institute of Standards and Technology (United States)
Theodore Vorburger, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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