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Proceedings Paper

Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor
Author(s): Jun Xu; Rongqiang Chi; Bo You; Xin Li; Haiying Wang; Hong Ai
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Paper Abstract

The miniature frequency-temperature sensor based on quartz tuning fork resonators with a new ZYtw-cut and vibrating in the flexural mode has been described. The resonance frequency of a quartz tuning fork crystal was comprehensively analyzed by an analytical method, Sezawa's approximations and the finite element method. The influence of the sensor structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design tuning fork geometry, tine electrode pattern and thickness of the micro quartz crystal tuning fork temperature sensor. The validity of calculated and simulated results is experimentally confirmed. The experimental results has shown that this new type of sensor with sensitivity about 0.001 degree C and accuracies 0.05 degree C within temperature range from -50 degree C to 200 degree C.

Paper Details

Date Published: 25 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801B (25 October 2006); doi: 10.1117/12.716148
Show Author Affiliations
Jun Xu, Harbin Univ. of Science and Technology (China)
Rongqiang Chi, Harbin Univ. of Science and Technology (China)
Bo You, Harbin Univ. of Science and Technology (China)
Xin Li, Harbin Univ. of Science and Technology (China)
Haiying Wang, Harbin Univ. of Science and Technology (China)
Hong Ai, Harbin Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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