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Proceedings Paper

Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution
Author(s): Ju-Yi Lee; Hui-Yi Chen; Cheng-Chih Hsu; Chyan-Chyi Wu
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Paper Abstract

A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800J (13 October 2006); doi: 10.1117/12.716145
Show Author Affiliations
Ju-Yi Lee, National Central Univ. (Taiwan)
Hui-Yi Chen, National Central Univ. (Taiwan)
Cheng-Chih Hsu, Industrial Technology Research Institute (Taiwan)
Chyan-Chyi Wu, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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