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Proceedings Paper

Development of automatic 3D profile measuring system
Author(s): Hong-Tsu Young; WeiYen Lin
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Paper Abstract

The objective of this research is to develop a non-contact measurement system for micro-scale 3D geometry. The core of the system is based on Shape-from-Focus method. Corresponding digital images were taken at different heights with predefined step interval. The images taken were enhanced by image processing techniques including discrete Gaussian filtering and histogram equalization. The degree of the focused image was quantified and, then the height of each pixel was determined with Gaussian Interpolation. 3D geometry model of the specimen can be reconstructed. The system developed was verified with a standard sphere of radius 225 μm. The result gave the average radius of 221.56 μm with the standard deviation 8.95 μm. Feasibility of the measuring system was confirmed with satisfactory precision level.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628011 (13 October 2006); doi: 10.1117/12.716135
Show Author Affiliations
Hong-Tsu Young, National Taiwan Univ. (Taiwan)
WeiYen Lin, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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