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Proceedings Paper

White-light interferometric techniques in microstructure measurement
Author(s): Kao-Hui Lin; Ya-Hui Hu
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Paper Abstract

In the optical non-contact measure fields, the white light interferometry technique is well-known. The measure resolutions of vertical and horizontal direction are determined by motion mechanism and grabbed images, respectively. Therefore, to permit measurement resolution of white light interferometry in 3D profile is very important. In this paper, a white light interferometric measurement technique that combines vertical scanning and phase shifting is proposed. High resolution of the vertical scanning technique can grab the images of short pitch displacement. The relationship between interference fringe and changed frequency of these images are solved by the FFT. Then, the interference fringe's center is computed by band-pass filter and maximum power position. The phase shifting is based on five-frame algorithm to acquire fringe order through vertical scanning. In the experiment result, first was used the grating that had calibrated by commercial instrument Talysurf CCI 6000 to calibrate the experiment implement longitudinal resolution, second was measured the roughness calibration gauge of Model SS-NS94/ No. N20674 /Ra 3.0μm. The results show that the resolution is arrived 1nm, it was quite obvious improving the traditional mechanic.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800X (13 October 2006); doi: 10.1117/12.716115
Show Author Affiliations
Kao-Hui Lin, Ching Yun Univ. (Taiwan)
Ya-Hui Hu, Nanya Institute of Technology (Taiwan)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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