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Proceedings Paper

Surface roughness parameters measurements by digital holographic microscopy (DHM)
Author(s): Frédéric Montfort; Yves Emery; Eduardo Solanas; Etienne Cuche; Nicolas Aspert; Pierre Marquet; Claude Joris; Jonas Kühn; Christian Depeursing
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Paper Abstract

Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800V (13 October 2006); doi: 10.1117/12.716113
Show Author Affiliations
Frédéric Montfort, Lyncée Tec SA (Switzerland)
Yves Emery, Lyncée Tec SA (Switzerland)
Eduardo Solanas, Lyncée Tec SA (Switzerland)
Etienne Cuche, Lyncée Tec SA (Switzerland)
Nicolas Aspert, Lyncée Tec SA (Switzerland)
Pierre Marquet, Lyncée Tec SA (Switzerland)
Claude Joris, Lyncée Tec SA (Switzerland)
Jonas Kühn, STI-IOA EPFL (Switzerland)
Christian Depeursing, STI-IOA EPFL (Switzerland)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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