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Proceedings Paper

Uncertainty analysis of mircoresonator using classical and interval methods
Author(s): B. Vasuki; M. Umapathy; G. Uma; M. Shanmugavalli; S. Meenatchisundaram
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Paper Abstract

This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

Paper Details

Date Published: 30 April 2007
PDF: 4 pages
Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 652812 (30 April 2007); doi: 10.1117/12.716054
Show Author Affiliations
B. Vasuki, National Institute of Technology, Tiruchirappalli (India)
M. Umapathy, National Institute of Technology, Tiruchirappalli (India)
G. Uma, National Institute of Technology, Tiruchirappalli (India)
M. Shanmugavalli, National Institute of Technology, Tiruchirappalli (India)
S. Meenatchisundaram, Manipal Institute of Technology (India)


Published in SPIE Proceedings Vol. 6528:
Nanosensors, Microsensors, and Biosensors and Systems 2007
Vijay K. Varadan, Editor(s)

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