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Proceedings Paper

A MEMS vibration sensor based on Mach Zehnder interferometers
Author(s): Tianwei Ma; Wenbin Zhao; Jiamin Liu
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Paper Abstract

Two micro-optomechanical accelerometers based on Multi-Mode Interference (MMI) couplers were designed and evaluated in this study. The optical components were optimized with the Parameter Scan Method. According to the photoelastic effect, the change in refractive index of a waveguide made of crystal materials is related to the mechanical strains in the waveguide. In this study, such change was calculated using the mechanical strains obtained from the Finite Element Analysis (FEA) results. Beam Propagation Method (BPM) was used to study the relationship between the input acceleration and the output optical power and thus the performance of the proposed accelerometers. The results show the two designs are suitable for different acceleration ranges.

Paper Details

Date Published: 18 April 2007
PDF: 8 pages
Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65292C (18 April 2007); doi: 10.1117/12.715780
Show Author Affiliations
Tianwei Ma, Univ. of Hawaii at Manoa (United States)
Wenbin Zhao, Global Communication Semiconductor (United States)
Jiamin Liu, Univ. of Hawaii at Manoa (United States)
Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6529:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007
Masayoshi Tomizuka; Chung-Bang Yun; Victor Giurgiutiu, Editor(s)

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