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Proceedings Paper

Microfabrication of a side-implanted piezoresistive shear-stress sensor
Author(s): Yawei Li; Toshikazu Nishida; David Arnold; Mark Sheplak
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Date Published:
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Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 652917; doi: 10.1117/12.715654
Show Author Affiliations
Yawei Li, Univ. of Florida (United States)
Toshikazu Nishida, Univ. of Florida (United States)
David Arnold, Univ. of Florida (United States)
Mark Sheplak, Univ. of Florida (United States)


Published in SPIE Proceedings Vol. 6529:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007
Masayoshi Tomizuka; Chung-Bang Yun; Victor Giurgiutiu, Editor(s)

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