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Proceedings Paper

Flexible ultrasonic array sensors for health monitoring
Author(s): M. Kobayashi; K.-T. Wu; L. Song; Q. Liu; C.-K. Jen
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Paper Abstract

Flexible ultrasonic array transducers which can be attached to the desired structures or materials for nondestructive testing and structural health monitoring applications at room and elevated temperatures are developed. These flexible ultrasonic transducers (UTs) arrays consist of a thin polyimide membrane with a bottom electrode or stainless steel foil, a piezoelectric lead-zirconate-titanate (PZT) composite film and top electrodes. The flexibility is realized owing to the porosity of piezoelectric film and the thinness of substrate and electrodes. Top and bottom electrode materials are silver paste, silver paint or electroless plated nickel alloys. The UT array is configured by the several top electrodes. The flexible UT has been successfully tested at 150°C and also immersed into water as immersion ultrasonic probe operated in the pulse-echo mode with good signal to noise ratio.

Paper Details

Date Published: 11 April 2007
PDF: 8 pages
Proc. SPIE 6532, Health Monitoring of Structural and Biological Systems 2007, 653211 (11 April 2007); doi: 10.1117/12.715301
Show Author Affiliations
M. Kobayashi, National Research Council of Canada (Canada)
K.-T. Wu, McGill Univ. (Canada)
L. Song, McGill Univ. (Canada)
Q. Liu, McGill Univ. (Canada)
C.-K. Jen, National Research Council of Canada (Canada)

Published in SPIE Proceedings Vol. 6532:
Health Monitoring of Structural and Biological Systems 2007
Tribikram Kundu, Editor(s)

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