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Proceedings Paper

Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM
Author(s): Qiangxian Huang; Satoshi Gonda; Ichiko Misumi; Taeho Keem; Tomizo Kurosawa
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Paper Abstract

By present, the calibration of dimensions in nano scale is being paid more and more attentions. One-dimensional grating standard with pitches in nano-scale is being proposed by the CCL-WGDM 7 to be one of the five key comparison parameters in the emerging field of nanometrology. In the pitch calibration of grating standard, Gravity Center Method and Zero-Cross Points Method are proposed. The two methods are analyzed and simulated under different conditions. Based on the actual measurement data obtained by AFM, the two methods are used and the best value is determined. The results in the paper are useful to pitch calibration in nano scale.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628007 (13 October 2006); doi: 10.1117/12.715251
Show Author Affiliations
Qiangxian Huang, Hefei Univ. of Technology (China)
National Institute of Advanced Industrial Science and Technology (Japan)
Satoshi Gonda, National Institute of Advanced Industrial Science and Technology (Japan)
Ichiko Misumi, National Institute of Advanced Industrial Science and Technology (Japan)
Taeho Keem, National Institute of Advanced Industrial Science and Technology (Japan)
Tomizo Kurosawa, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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