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Proceedings Paper

Performance evaluation of a new type of jetting dispenser using piezoelectic actuator
Author(s): Min-Kyu Choi; Bo-Young Yun; Quoc-Hung Nguyen; Seung-Bok Choi; Sung-Min Hong
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Paper Abstract

This paper presents a new type of jetting dispenser featuring piezoelectric actuator in order to achieve high flow rate and small dot sizes in semiconductor packaging processes. After describing structural components of the dispensing mechanism and the operating principle, a dynamic modeling is undertaken by considering the behavior of the piezostack, hydraulic magnification, dispensing needle and adhesive fluid. In the modeling, fluid models for adhesive fluid and hydraulic magnification are derived with a dumped parameter method. The governing equation of motion is then derived by integrating the fluid models with structural model. Subsequently, the dynamic behavior of the dispenser and its dispensing amount are investigated by applying several types of square wave driving voltage input and design parameter values are determined.

Paper Details

Date Published: 27 April 2007
PDF: 9 pages
Proc. SPIE 6525, Active and Passive Smart Structures and Integrated Systems 2007, 652522 (27 April 2007); doi: 10.1117/12.715161
Show Author Affiliations
Min-Kyu Choi, Inha Univ. (South Korea)
Bo-Young Yun, Inha Univ. (South Korea)
Quoc-Hung Nguyen, Inha Univ. (South Korea)
Seung-Bok Choi, Inha Univ. (South Korea)
Sung-Min Hong, Inha Univ. (South Korea)

Published in SPIE Proceedings Vol. 6525:
Active and Passive Smart Structures and Integrated Systems 2007
Yuji Matsuzaki; Mehdi Ahmadian; Donald J. Leo, Editor(s)

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