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Proceedings Paper

Replication technology as a means of implementing polymer MOEMS
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Paper Abstract

Replication technologies have been recommended as an alternative means of high volume manufacturing of the polymer optical components with low-cost. We demonstrated replication technology as a means of implementing polymer-based MOEMS. To achieve this, a polymer optical bench with embedded electric circuits was designed to integrate the functional planar-lightwave-circuit (PLC)-type optical waveguide devices; the designed packaging structures were realized using a novel fabrication process that incorporated the UV imprint technique. In addition, the detail fabrication steps of the UV imprint process were investigated. The optical bench has v-grooves for the fiber ribbon and the alignment pits for opoelectronic interconnection. The plastic mold for imprinting the designed optical bench was made of UV-transparent perfluorinated polymer material. The designed optical bench was configured on the electric-circuitpatterned silicon substrate. Flip-chip bonded polymer optical waveguide device showed not only a good electric contact but also a coupling loss of 0.9 dB at a wavelength of 1.5 ?m. It was concluded that replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems.

Paper Details

Date Published: 7 March 2007
PDF: 7 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620H (7 March 2007); doi: 10.1117/12.715102
Show Author Affiliations
Jin Tae Kim, Electronics and Telecommunications Research Institute (South Korea)
Jung Jin Ju, Electronics and Telecommunications Research Institute (South Korea)
Suntak Park, Electronics and Telecommunications Research Institute (South Korea)
Seung Koo Park, Electronics and Telecommunications Research Institute (South Korea)
Min-Su Kim, Electronics and Telecommunications Research Institute (South Korea)
Hyung-Jong Lee, ChemOptics, Inc. (South Korea)
Myung-Hyun Lee, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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