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Proceedings Paper

Fabrication and characterization of individually addressable vertical-cavity surface-emitting laser arrays and integrated VCSEL/PIN detector arrays
Author(s): A. M. Kasten; A. V. Giannopoulos; C. Long; C. Chen; K. D. Choquette
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Paper Abstract

With the emergence of the internet, the demand for high data transmission rates in short haul area networks and fiber-to-the- desktop applications is increasing every year. Densely packed one-dimensional and two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays offer new possibilities for future short haul parallel optical links, free-space optical interconnects at the chip-to-chip, board-to-board, and on-board level. In this paper, we describe the manufacturing process of individually addressable two-dimensional VCSEL arrays, PIN detector arrays, and integrated VCSEL / PIN detector arrays. We also present measurement results of the fabricated devices and comment on the reliability.

Paper Details

Date Published: 7 February 2007
PDF: 6 pages
Proc. SPIE 6484, Vertical-Cavity Surface-Emitting Lasers XI, 64840C (7 February 2007); doi: 10.1117/12.715086
Show Author Affiliations
A. M. Kasten, Univ. of Illinois at Urbana-Champaign (United States)
A. V. Giannopoulos, Univ. of Illinois at Urbana-Champaign (United States)
C. Long, Univ. of Illinois at Urbana-Champaign (United States)
C. Chen, Univ. of Illinois at Urbana-Champaign (United States)
K. D. Choquette, Univ. of Illinois at Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 6484:
Vertical-Cavity Surface-Emitting Lasers XI
Kent D. Choquette; James K. Guenter, Editor(s)

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