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Proceedings Paper

Challenging micro-optical applications demand diverse manufacturing solutions
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Paper Abstract

Many manufacturing techniques have been developed and implemented to fabricate a wide range of micro-optical products. The challenges of the micro-optics business are diverse and tend to resist a widely accepted manufacturing process such as has been implemented for CMOS fabrication. Many of the challenges that have been addressed with various solutions include optical waveband of operation from DUV through LWIR, material systems, cost of manufacturing for the intended application space, feature sizes based on device functionality, and fabrication technology based on the manufacturing volume. Some of the technologies to be discussed include device patterning by e-beam lithography, optical lithography, direct CNC machining and micro-polishing, and plastic replication.

Paper Details

Date Published: 7 March 2007
PDF: 11 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620X (7 March 2007); doi: 10.1117/12.715022
Show Author Affiliations
Gregg Borek, MEMS Optical, Inc. (United States)
Peter Weissbrodt, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Manfred Schrenk, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Matthias Cumme, JENOPTIK Laser, Optik, Systeme GmbH (Germany)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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