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Proceedings Paper

The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates
Author(s): Clarence Chui; Philip D. Floyd; David Heald; Brian Arbuckle; Alan Lewis; Manish Kothari; Bill Cummings; Lauren Palmateer; Jan Bos; Daniel Chang; Jedi Chiang; Li-Ming Wang; Edmon Pao; Fritz Su; Vincent Huang; Wen-Jian Lin; Wen-Chung Tang; Jia-Jiun Yeh; Chen-Chun Chan; Fang-Ann Shu; Yuh-Diing Ju
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Paper Abstract

QUALCOMM has developed and transferred to manufacturing iMoD displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.

Paper Details

Date Published: 22 January 2007
PDF: 8 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646609 (22 January 2007); doi: 10.1117/12.713949
Show Author Affiliations
Clarence Chui, QUALCOMM MEMS Technologies, Inc. (United States)
Philip D. Floyd, QUALCOMM MEMS Technologies, Inc. (United States)
David Heald, QUALCOMM MEMS Technologies, Inc. (United States)
Brian Arbuckle, QUALCOMM MEMS Technologies, Inc. (United States)
Alan Lewis, QUALCOMM MEMS Technologies, Inc. (United States)
Manish Kothari, QUALCOMM MEMS Technologies, Inc. (United States)
Bill Cummings, QUALCOMM MEMS Technologies, Inc. (United States)
Lauren Palmateer, QUALCOMM MEMS Technologies, Inc. (United States)
Jan Bos, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Daniel Chang, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Jedi Chiang, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Li-Ming Wang, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Edmon Pao, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Fritz Su, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Vincent Huang, QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan)
Wen-Jian Lin, Prime View International Co., Ltd. (Taiwan)
Wen-Chung Tang, Prime View International Co., Ltd. (Taiwan)
Jia-Jiun Yeh, Prime View International Co., Ltd. (Taiwan)
Chen-Chun Chan, Prime View International Co., Ltd. (Taiwan)
Fang-Ann Shu, Prime View International Co., Ltd. (Taiwan)
Yuh-Diing Ju, Prime View International Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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