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Proceedings Paper

Fabrication of a microfluidic system with integrated electrochemical pump and valves
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Paper Abstract

An integrated microfluidic system with a check valve and a micropump based on electrochemical actuation was designed and fabricated using UV-LIGA microfabrication technologies. The main components of the system include two electrochemical (ECM) actuators, a polydimethylsiloxane (PDMS) membrane, and multi levels of covers. The thickness of the membrane is 100 &mgr;m thick and the thickness of the PDMS structure is 1000 &mgr;m. Hydrogen gas bubbles were generated from Pt black electrodes with 1M of NaCl solution in the valve chamber. Experimental results proved that the system can be operated by controlling the electrical signals supplied to the ECM actuators.

Paper Details

Date Published: 22 January 2007
PDF: 8 pages
Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 64650B (22 January 2007); doi: 10.1117/12.713916
Show Author Affiliations
Dong Eun Lee, Louisiana State Univ. (United States)
Steven Soper, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 6465:
Microfluidics, BioMEMS, and Medical Microsystems V
Ian Papautsky; Wanjun Wang, Editor(s)

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