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Proceedings Paper

XUV spectroscopy of mass-limited Sn-doped laser micro-plasmas
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Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173H; doi: 10.1117/12.713450
Show Author Affiliations
Simi A. George, College of Optics & Photonics/Univ. of Central Florida (United States)
Chiew-Seng Koay, IBM Corp. (United States)
Kazutoshi Takenoshita, College of Optics & Photonics/Univ. of Central Florida (United States)
Tobias Schmid, College of Optics & Photonics/Univ. of Central Florida (United States)
Robert Bernath, College of Optics & Photonics/Univ. of Central Florida (United States)
Moza M. Al-Rabban, Univ. of Qatar (Qatar)
Howard A. Scott, Lawrence Livermore National Lab. (United States)
Martin C. Richardson, College of Optics & Photonics/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 6517:
Emerging Lithographic Technologies XI
Michael J. Lercel, Editor(s)

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