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Proceedings Paper

Advances in laser processing of microelectronics
Author(s): B. W. Baird; R. F. Hainsey; X. Peng; P. Y. Pirogovsky
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Paper Abstract

We report on recent advances in laser processing of solar cells, flexible printed circuit boards, integrated circuit packages, and semiconductor memory in the nanosecond pulsewidth regime. These process advances are enabled by innovations in lasers and continue to drive requirements for emerging pulsed solid state and fiber lasers. Demand for increased throughput is projected to push the pulse repetition frequency for pulsed solid state sources utilized in many of these applications past 100 KHz. Ongoing device miniaturization continues to enable new applications for visible and ultraviolet pulsed laser processes, particularly for semiconductor devices. This paper summarizes the current status of these select laser processes, the laser sources that power them, and the outlook for future innovations in the field.

Paper Details

Date Published: 20 February 2007
PDF: 11 pages
Proc. SPIE 6451, Solid State Lasers XVI: Technology and Devices, 64511K (20 February 2007); doi: 10.1117/12.713213
Show Author Affiliations
B. W. Baird, Electro Scientific Industries, Inc. (United States)
R. F. Hainsey, Electro Scientific Industries, Inc. (United States)
X. Peng, Electro Scientific Industries, Inc. (United States)
P. Y. Pirogovsky, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 6451:
Solid State Lasers XVI: Technology and Devices
Hanna J. Hoffman; Ramesh K. Shori; Norman Hodgson, Editor(s)

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