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Proceedings Paper

Contact angles and structure/surface property relationships of immersion materials
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Paper Abstract

Surface properties of materials are an important, even vital, consideration in immersion lithography. Many investigations have shown that sessile drop static contact angles are not entirely useful in the design of high performance immersion lithography surfaces. We have synthesized and characterized a broad family of "hydrophobic" materials and this paper will share information on the role of molecular structure on contact angles and hysteresis of these immersion materials. Insight into the relationship between structure and contact angles for future immersion materials will be presented.

Paper Details

Date Published: 2 April 2007
PDF: 9 pages
Proc. SPIE 6519, Advances in Resist Materials and Processing Technology XXIV, 65191Q (2 April 2007); doi: 10.1117/12.712632
Show Author Affiliations
Linda K. Sundberg, IBM Almaden Research Ctr. (United States)
Daniel P. Sanders, IBM Almaden Research Ctr. (United States)
Ratnam Sooriyakumaran, IBM Almaden Research Ctr. (United States)
Phillip J. Brock, IBM Almaden Research Ctr. (United States)
Robert D. Allen, IBM Almaden Research Ctr. (United States)


Published in SPIE Proceedings Vol. 6519:
Advances in Resist Materials and Processing Technology XXIV
Qinghuang Lin, Editor(s)

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