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Proceedings Paper

Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles
Author(s): Takeshi Higashiguchi; Sumihiro Suetake; Yusuke Senba; Yusuke Sato; Akira Hosotani; Yukari Takahashi; Shoichi Kubodera
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Paper Abstract

Characteristics of suprathermal ions and neutral particles from a laser-produced tin plasma by use of a colloidal microjet target containing tin dioxide (SnO2) nanoparticles were investigated. Suprathermal ion emissions were reduced by producing a low-density preplasma. Simultaneously, the maximum conversion efficiency of 1.2% at 13.5 nm with a bandwidth of 2% and a solid angle of 2&pgr; sr was observed. Neutral particles, however, were not suppressed under the optimum laser-plasma conditions.

Paper Details

Date Published: 21 March 2007
PDF: 10 pages
Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173D (21 March 2007); doi: 10.1117/12.711983
Show Author Affiliations
Takeshi Higashiguchi, Univ. of Miyazaki (Japan)
Sumihiro Suetake, Univ. of Miyazaki (Japan)
Yusuke Senba, Univ. of Miyazaki (Japan)
Yusuke Sato, Univ. of Miyazaki (Japan)
Akira Hosotani, Univ. of Miyazaki (Japan)
Yukari Takahashi, Univ. of Miyazaki (Japan)
Shoichi Kubodera, Univ. of Miyazaki (Japan)

Published in SPIE Proceedings Vol. 6517:
Emerging Lithographic Technologies XI
Michael J. Lercel, Editor(s)

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