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Proceedings Paper

An approach to modeling and on-line identification for piezoelectric stack actuator
Author(s): Yueyu Wang; Xuezeng Zhao; Wei Chu
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Paper Abstract

The piezoelectric stack actuator used in Scanning Probe Microscopes (SPMs) always exhibits significant hysteresis and creep. The hysteresis and creep will reduce the positioning precision and produce the distortion in scanning images. Therefore it is necessary to develop a model with sufficient accuracy and stability to characterize the nonlinearities of the piezoelectric stack actuator. In this paper, a novel hysteresis and creep model and a method for on-line identifying parameters of this model are proposed. Experiment result shows that, actuated by triangular-wave voltage, the predicting error using the proposed model is less than 2%, which is reduced by an order of magnitude comparing with the error directly predicted using input voltage. The validity of this method is demonstrated by experiment result.

Paper Details

Date Published: 5 April 2007
PDF: 10 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65184J (5 April 2007); doi: 10.1117/12.711851
Show Author Affiliations
Yueyu Wang, Harbin Institute of Technology (China)
Xuezeng Zhao, Harbin Institute of Technology (China)
Wei Chu, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)

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