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Proceedings Paper

OPC in memory-device patterns using boundary layer model for 3-dimensional mask topographic effect
Author(s): Young-Chang Kim; Insung Kim; JeongGeun Park; Sangwook Kim; Sungsoo Suh; Yongjin Cheon; Sukjoo Lee; Junghyeon Lee; Chang-Jin Kang; Jootae Moon; Jonathan Cobb; Sooryong Lee
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Paper Abstract

Boundary Layer Model (BLM) is applied to OPC for typical memory-device patterning processes for 3D mask topographic effect. It is observed that this BLM successfully accounts for the 3D mask effect as reducing OPC model error down to sub-50 nm node. BLM improves OPC-modeling accuracy depending on specific process conditions such as mask type and pattern geometry. Potential limit of BLM, i.e., how accurately BLM could predict the 3D mask effect is also investigated with respect to CD change: BLM also compared with rigorous simulation for various features and a good match is obtained as small as below 0.5 nm. Some practical issue in OPC modeling such as determination of the phase of boundary layer is addressed, which can be critical for prediction of defocus behavior.

Paper Details

Date Published: 26 March 2007
PDF: 12 pages
Proc. SPIE 6520, Optical Microlithography XX, 65200T (26 March 2007); doi: 10.1117/12.711832
Show Author Affiliations
Young-Chang Kim, Samsung Electronics Co., Ltd. (South Korea)
Insung Kim, Samsung Electronics Co., Ltd. (South Korea)
JeongGeun Park, Samsung Electronics Co., Ltd. (South Korea)
Sangwook Kim, Samsung Electronics Co., Ltd. (South Korea)
Sungsoo Suh, Samsung Electronics Co., Ltd. (South Korea)
Yongjin Cheon, Samsung Electronics Co., Ltd. (South Korea)
Sukjoo Lee, Samsung Electronics Co., Ltd. (South Korea)
Junghyeon Lee, Samsung Electronics Co., Ltd. (South Korea)
Chang-Jin Kang, Samsung Electronics Co., Ltd. (South Korea)
Jootae Moon, Samsung Electronics Co., Ltd. (South Korea)
Jonathan Cobb, Synopsys, Inc. (United States)
Sooryong Lee, Synopsys, Inc. (United States)


Published in SPIE Proceedings Vol. 6520:
Optical Microlithography XX
Donis G. Flagello, Editor(s)

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