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Proceedings Paper

Two-dimensional pattern design and application for Dipole illumination
Author(s): Young-Cheol Lim
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Date Published:
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Proc. SPIE 6520, Optical Microlithography XX, ; doi: 10.1117/12.711809
Show Author Affiliations
Young-Cheol Lim, SAMSUNG Electronics Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 6520:
Optical Microlithography XX
Donis G. Flagello, Editor(s)

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