Share Email Print

Proceedings Paper

Two-dimensional pattern design and application for Dipole illumination
Author(s): Young-Cheol Lim
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
Proc. SPIE 6520, Optical Microlithography XX, ; doi: 10.1117/12.711809
Show Author Affiliations
Young-Cheol Lim, SAMSUNG Electronics Co., Ltd. (South Korea)

Published in SPIE Proceedings Vol. 6520:
Optical Microlithography XX
Donis G. Flagello, Editor(s)

© SPIE. Terms of Use
Back to Top