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Proceedings Paper

Reflectance and fluorescence imaging with a MEMS dual–axes confocal microscope
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Paper Abstract

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm x 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

Paper Details

Date Published: 22 January 2007
PDF: 8 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660G (22 January 2007); doi: 10.1117/12.711560
Show Author Affiliations
Hyejun Ra, Stanford Univ. (United States)
Wibool Piyawattanametha, Stanford Univ. (United States)
National Electronics and Computer Technology Ctr. (Thailand)
Yoshihiro Taguchi, Stanford Univ. (United States)
Olav Solgaard, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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