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Proceedings Paper

A study of voltage contrast image using Monte Carlo simulation
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Paper Abstract

Using Monte Carlo simulation, we studied voltage contrast (VC) image caused by negative charging. In order to simulate the VC image, we have developed an electron scattering program based on a consideration of the spatial charge conduction model. Also we have established a cluster computing system of 60 CPUs to shorten the processing time. Using a Monte Carlo simulator, we succeeded in obtaining the simulated VC image. Comparison between simulated images and experimental images reveals that the simulated images are in good agreement with some experimental images.

Paper Details

Date Published: 15 March 2007
PDF: 11 pages
Proc. SPIE 6517, Emerging Lithographic Technologies XI, 651712 (15 March 2007); doi: 10.1117/12.711405
Show Author Affiliations
T. Ota, Toshiba Corp. (Japan)
T. Koshiba, Toshiba Corp. (Japan)
T. Nakasugi, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 6517:
Emerging Lithographic Technologies XI
Michael J. Lercel, Editor(s)

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